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SS III series of D/C magnetron sputtering power supply

SS  III series of D/C magnetron sputtering power supply work in the secondary high frequency conversion mode, unipolar pulse output, the supply current and pulse width adjusted independently. When Pulse working mode, the sputtering target working on high frequency intermittent state, So that the surface of the target material accumulated charge has a certain discharge time, Beneficial to the inhibition of target arc discharge and surface poisoning, applicable to the reaction layer environment.

Power range  10-120KW
Input power AC380V  three phase four wire system AC50-60HZ + 10%
Output mode Pulse
Pulse width 10-90%
Output voltage 800V[no-load]
Arc extinction time ��3uS
The stability of the output voltage ratio 0.5%
Cooling mode

10-60KW : air-cooled ,

60-120KW : water-cooled

The use of the environment

Ambient temperature : 0-40C

Ambient humidity : Relative humidity �� 85%

Clean air��No dust��Non corrosive flammable gas��Good ventilation

Cooling water

Clean��does not contain minerals and other soluble substances

Water temperature : 20-30

Pressure :  0.15 + 0.05Mpa

Communication mode Analog/RS485/RS232
Description The power supply output data according to the use need to be adjusted accordingly


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