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SSTH series of Intermediate frequency Magnetron sputtering power supply

SSTH series of Intermediate frequency Magnetron sputtering power supply work in the secondary high frequency conversion mode, AC sinusoidal output .It make two sputtering target as load , two target alternating work, so the sputtering target of a sputtering period more than half of the time for the reverse voltage cutoff sputtering, so that the accumulated charge some to fully discharge, beneficial to the inhibition of target arc discharge and surface poisoning. This power supply has unique arc suppression function, effectively overcome the arc on the film caused by defects, early warning system real time display power status, in order to eliminate potential problems. It is especially suitable for high-power sputtering film, such as Low-E glass production line and metal non metal winding coating using.

Power range 


Input power

AC380V three phase four wire systemAC50-60HZ + 10%

Output mode 

Quasi-sine wave

Output voltage

No-load 1100V [value]

Pulse frequency


Output characteristics

Constant current,voltage,power

arc extinction time ��3uS
The stability of the output voltage ratio 0.25%
Load duration rate


Cooling mode


The use of the environment

Ambient temperature : 0-40C

Ambient humidity : Relative humidity �� 85%

Clean air��No dust��Non corrosive flammable gas��Good ventilation

Cooling water

Clean��does not contain minerals and other soluble substances

Water temperature : 20-30

Pressure : 0.15 + 0.05Mpa

Description The power supply output data according to the use need to be adjusted accordingly

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