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SST series of Intermediate frequency Magnetron sputtering power supply


SST series of Intermediate frequency Magnetron sputtering power supply work in the secondary high frequency conversion mode,AC sinusoidal output .The power output frequency is set for a typical 40KHZ. It make two sputtering target as load , two target alternating work, so the sputtering target of a sputtering period more than half of the time for the reverse voltage cutoff sputtering, so that the accumulated charge some to fully discharge, beneficial to the inhibition of target arc discharge and surface poisoning, especially suitable for the reaction layer environment

Power range  10-120KW
Input power AC380V three phase four wire systemAC50-60HZ + 10%
Output mode  ACSine wave
Output voltage 1000V[no-load][value]
Arc extinction time ��3uS
The stability of the output voltage ratio 0.25%
Cooling mode

2-10KW : air-cooled ,

10-120KW : water-cooled

The use of the environment

Ambient temperature : 0-40C

Ambient humidity : Relative humidity �� 85%

Clean air��No dust��Non corrosive flammable gas��Good ventilation

Cooling water

Clean��does not contain minerals and other soluble substances

Water temperature : 20-30

Pressure : 0.15 + 0.05Mpa

Communication mode Analog/RS485/RS232
Description The power supply output data according to the use need to be adjusted accordingly



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