Location��HOME > Products > Details

SS-II series of D/C magnetron sputtering power supply

SS-II series of D/C magnetron sputtering power supply work at high frequency conversion mode, DC output, the supply current is adjusted by changing the frequency converter pulse width to achieve. It has a good load characteristic, cost-effective, suitable for metal and reaction layer environment.
Power range 10-120KW
Input power AC380V three phase four wire system AC50-60HZ + 10%
Output mode  D/C
Output voltage 800V[no-load]
Arc extinction time ��20uS
The stability of the output voltage ratio 0.5%
Cooling mode 10-60KW : air-cooled ,60-120KW : water-cooled
The use of the environment

Ambient temperature : 0-40C

Ambient humidity : Relative humidity �� 85%

Clean air��No dust��Non corrosive flammable gas��Good ventilation

Cooling water

Clean��does not contain minerals and other soluble substances

Water temperature : 20-30

Pressure : 0.15 + 0.05Mpa

Communication mode Analog/RS485/RS232
Description The power supply output data according to the use need to be adjusted accordingly


<< Back